STnano : STrasbourg nanotechnology Facility
STnano facility is member of the National Network of Nanotechnology facilities. The platform has a dedicated 180 m2 ISO class 6 cleanroom area, including several ISO class 5 workspaces. A laboratory dedicated to electron beam lithography completes the platform. The cleanroom is temperature and humidity controlled to 20C, 45% RH. The platform has currently all the necessary equipment for basic processes for the nanofabrication of devices down to several tens of nanometers. STnano trains more than 30 users annually. Aims of STnano are:
- basic or advanced training to nanofabrication processes
- give access to state of art equipment
- fostering partnerships with industry and research centers
